Guide d'onde Radiofrequency magnetron sputtering Conductivity Rare earth Phase transition Pulvérisation magnétron radiofréquence Semiconductors Oxide materials Silicon nanoclusters GENOMIQUE Silicon nanocrystals Electroluminescence Photoluminescence Couches minces semi-conductrices Magnetron sputtering Electron paramagnetic resonance Terres rares Hafnium silicate Irradiation Down-conversion Microstructure Nanoparticules Hillocks Atom probe tomography Optical properties XRD Pulvérisation cathodique Lifetime Microstructure physics Microstructure physique Raman Feature erasure Si nanocluster Hafnium silicates Rare-earth Quantum-well CO adsorption Cathodoluminescence Silicium Silicon Oxides Rare-earth ions AFM Nanostructuring Films Couches minces Oxygen vacancies Epitaxy Crystal structure FTIR M-lines Grazing incidence X-ray diffraction Nanostructures Multilayers High-k dielectrics Erbium Waveguides Infrared absorption Terbium Liposomes IR spectroscopy Nanostructure Matériaux hybrides RF magnetron sputtering Neodymium Doping Oxide interface Thin films Luminescence HR STEM-HAADF Optical amplifiers Sputtering Copper Waveguide Si-rich silicon oxide CoMoS Laser pyrolysis SiC ADE-FDTD Friction Hybrid materials Raman scattering Photovoltaic Thin film Cerium PZT Nanostructured materials Computational electromagnetic methods Reactive magnetron sputtering Nanoparticles Al2O3 Rare earths MoS2 Structural properties Silicon nitride Refractive index Silicon photonics Citric acid Energy transfer Fluorescence